منابع مشابه
New Design of Mems piezoresistive pressure sensor
The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...
متن کاملModeling of capacitance and sensitivity of a MEMS pressure sensor
In this paper modeling of capacitance and sensitivity for MEMS capacitive pressure sensor is presented. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes versus pressure. Therefore first the diaphragm displacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM). It can b...
متن کاملHigh Accuracy MEMS Pressure Sensor Based on Quartz Crystal Resonator
Beijing Research Institute of Telemetry, Beijing 100000, China; [email protected] (C.Z.); [email protected] (D.X.H.); [email protected] (X.F.J.); [email protected] (S.M.Z.); [email protected] (J.B.Z.); [email protected] (M.M.W.); [email protected] (W.B.L.); [email protected] (Y.B.G.) * Correspondence: [email protected]; Tel.: +86-10-6819-8271 † Presented at the Eurosensors 2017 Conference, Paris, ...
متن کاملPolyimide/SU-8 catheter-tip MEMS gauge pressure sensor
This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive eleme...
متن کاملMEMS Pressure Sensor With Two Thin Film Piezoelectric Read-Out
We propose the structure to have only two pares of PZT thin films on the basis of [11]. This causes the structure to become simpler and easier to fabricate. And except its first vibration mode that is also the base mode, the other modes have no effect on the acceleration measurement. So it can be a better choice for the measurement of acceleration and it can have a huge potential as a micro-sen...
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ژورنال
عنوان ژورنال: International Journal of Engineering & Technology
سال: 2017
ISSN: 2227-524X
DOI: 10.14419/ijet.v7i1.5.9153